Electrode design and coupling optimization of Aluminum Nitride DETF

In this work we report a model to design and optimize the actuation electrode of Aluminum Nitride (AlN) Double Ended Tuning Forks (DETF). Based on the results of the analytical model three different actuation layouts were designed. The first electrode layout is based on a single-port DETF, the second layout has a two-port asymmetric electrode pattern and the third layout is based on a two-port symmetric electrode pattern. In order to compare the three actuation methods, three AlN DETF were fabricated and characterized. In this work we show that the two-port symmetric electrode layout has several advantages over the other designs as it achieves higher Q-factors and can enable further miniaturization of the resonating DETF.