Thin-film actuated mirror spatial light valve for high-brightness projection displays

fYear

1998

fDate

20-24 July 1998

Abstract

Summary form only given. At the present time, there is no projection display device that can transmit enough light to the screen for the display of electronic images at normal room light condition with high brightness and high contrast. Thin Film Actuated Mirror Array (TFAMA) is a breakthrough reflective type light modulator that uses micromachined thin-film piezoelectric actuators in conjunction with microscopic mirrors. In this paper, the operation, design, fabrication, and performance of TFAMA devices are described for high-brightness projection display systems.

Keywords

display devices; etching; light valves; micro-optics; microactuators; micromachining; mirrors; optical fabrication; optical projectors; piezoelectric actuators; spatial light modulators; design; double sacrificial layer process; fabrication; fill factor; high-brightness projection displays; linear actuation; micromachined thin-film piezoelectric actuators; microscopic mirrors; operation; performance; reflective type light modulator; spatial light valve; thin film actuated mirror array; tilting angle control; Brightness; Displays; Microscopy; Optical arrays; Optical modulation; Piezoelectric actuators; Piezoelectric films; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689856

Filename

689856