Quantifying the value of ownership of yield analysis technologies

Author

Weber, Charles ; Sankaran, Vijay ; Scher, Gary ; Tobin, Kenneth W., Jr.

Author_Institution

Sloan Sch. of Manage., MIT, Cambridge, MA, USA

fYear

1999

fDate

1999

Firstpage

64

Lastpage

70

Abstract

A model based on information theory, which allows yield managers to determine the optimal portfolio of yield analysis technologies for both the R&D and volume production environments, is presented. The knowledge extraction per experimentation cycle and knowledge extraction per unit time serve as benchmarking metrics for yield learning. They enable yield managers to make objective comparisons of apparently unrelated technologies. Combinations of four yield analysis tools-electrical testing, automatic defect classification, spatial signature analysis and wafer position analysis-are examined in detail to determine the relative value of ownership of different yield analysis technologies

Keywords

cost-benefit analysis; integrated circuit yield; production testing; automatic defect classification; benchmarking metrics; electrical testing; information theory; knowledge extraction; relative value of ownership; spatial signature analysis; volume production environments; wafer position analysis; yield analysis technologies; yield management; Benchmark testing; Data mining; Environmental management; Information analysis; Information theory; Integrated circuit technology; Production; Research and development; Research and development management; Technology management;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

Conference_Location

Boston, MA

ISSN

1078-8743

Print_ISBN

0-7803-5217-3

Type

conf

DOI

10.1109/ASMC.1999.798183

Filename

798183