DocumentCode
3231277
Title
Two-dimensional optical scanner with large angular rotation realized by self-assembled micro-elevator
Author
Fan, L. ; Wu, M.C.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fYear
1998
fDate
20-24 July 1998
Abstract
A novel 2D scanner with large mirror area and large angular rotation has been proposed and demonstrated. The mirror is supported by the surface-micromachined micro-elevators by self-assembly. Maximum optical deflection angles of of /spl plusmn/14/spl deg/ and a resonant frequency of 1.5 kHz have been achieved.
Keywords
beam steering; electrostatic actuators; micro-optics; micromachining; micromechanical resonators; mirrors; optical deflectors; optical fabrication; optical scanners; 2D optical scanner; MEMS technology; beam steering; electrostatic force; large angular rotation; large mirror area; microactuator plates; micromirror; resonant frequency; self-assembled micro-elevator; surface-micromachined; Actuators; Electrodes; High speed optical techniques; Micromechanical devices; Micromirrors; Mirrors; Optical beams; Optical sensors; Two dimensional displays; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location
Monterey, CA, USA
Print_ISBN
0-7803-4953-9
Type
conf
DOI
10.1109/LEOSST.1998.689857
Filename
689857
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