A view to the future-a modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry

Author

Bader, Uwe ; Besler, Astrid ; Schliesser, Jochen ; Dorner, Johann

Author_Institution

Fraunhofer Soc, Inst. of Manuf. Eng. & Autom., Stuttgart, Germany

fYear

1999

fDate

1999

Firstpage

109

Lastpage

112

Abstract

The mounting pressure of costs in the semiconductor industry has led to the use of increasingly complex production sequences, bigger substrates and shorter planning times. More and more, this also demands the fast, precisely-detailed planning of automation systems because the required transport and stocker tasks can no longer be carried out using conventional, often manual methods. This article describes a modular simulation kit for the semiconductor industry, representing a reasonably-priced experimentation field for planning and optimizing transport and stocker systems. Results from various projects will be presented illustrating this tool´s range of performance for simulating complete semiconductor fabs and fab-wide automation systems

Keywords

cost-benefit analysis; integrated circuit economics; materials handling; strategic planning; automated material handling systems; cost-efficient fab-wide planning; modular simulation kit; planning times; production sequences; semiconductor industry; stocker systems; transport systems; Costs; Electronics industry; Investments; Manufacturing automation; Materials requirements planning; Production planning; Semiconductor device manufacture; Storage automation; Substrates; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

Conference_Location

Boston, MA

ISSN

1078-8743

Print_ISBN

0-7803-5217-3

Type

conf

DOI

10.1109/ASMC.1999.798193

Filename

798193