On-wafer calibration techniques for measurement of microwave circuits and devices on thin substrates

Author

Pla, J. ; Struble, M. ; Colomb, F.

Author_Institution

Adv. Device Center, Raytheon Co., Andover, MA, USA

fYear

1995

fDate

16-20 May 1995

Firstpage

1045

Abstract

Two sets of on-wafer microstrip calibration standards were fabricated on 50 /spl mu/m GaAs and 25 /spl mu/m polyimide substrates for the purpose of measuring microwave circuits and devices up to 50 GHz. The accuracies of one and two tier LRM and TRL calibration techniques were investigated on PHEMT devices. Substantial improvements were found with the use of a weight function in the averaging of two tier TRL and LRM-TRL calibrations. The dependence of the isolation on the spacing between the input and output probes was also determined for these thin substrates.<>

Keywords

MIMIC; MMIC; S-parameters; calibration; gallium arsenide; integrated circuit testing; measurement standards; microstrip components; microwave measurement; millimetre wave measurement; polymer films; substrates; 25 micron; 50 GHz; 50 micron; GaAs; GaAs substrates; PHEMT devices; TRL calibration technique; isolation dependence; microwave circuits; microwave devices; on-wafer calibration techniques; one tier LRM technique; onwafer microstrip calibration standards; polyimide substrates; probe spacing; thin substrates; two tier LRM technique; weight function; Calibration; Gallium arsenide; Measurement standards; Microstrip; Microwave circuits; Microwave devices; Microwave measurements; Microwave theory and techniques; PHEMTs; Polyimides;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1995., IEEE MTT-S International

Conference_Location

Orlando, FL, USA

ISSN

0149-645X

Print_ISBN

0-7803-2581-8

Type

conf

DOI

10.1109/MWSYM.1995.406151

Filename

406151