A compact microstructure mechanical property measuring system

Author

Chen, Tao ; Zhang, Lin ; Wu, Jian ; Liu, Shibing ; Zuo, Tiechuan

Author_Institution

Inst. of Laser Eng., Beijing Univ. of Technol., Beijing

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

5

Lastpage

8

Abstract

In this paper, we introduce a compact measuring system, to analyze microstructure force property. The system is specially designed in which a mechanical test machine, a PCB board based on an USB connection for device driving and data collection, and processing software were contained. This system can be used for measuring deformation characteristics of MEMS structures by bending method. To confirm the feasibility of the system, an experiment was performed on a micro pillar.

Keywords

measurement systems; micromechanical devices; printed circuits; MEMS structures; PCB board; USB connection; bending method; compact measuring system; data collection; device driving; mechanical test machine; micro pillar; microstructure force property; microstructure mechanical property measuring system; Distortion measurement; Force measurement; Hardware; Mechanical factors; Mechanical variables measurement; Micromechanical devices; Microstructure; Stress; Transistors; Universal Serial Bus; MEMS measurement; USB-Based system; material force property;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484275

Filename

4484275