Design of a partially decoupled high precision XYZ compliant parallel micromanipulator

Author

Xu, Qingsong ; Li, Yangmin

Author_Institution

Dept. of Electromech. Eng., Univ. of Macau, Macao

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

13

Lastpage

18

Abstract

A newly designed three-degree-of-freedom compliant parallel micromanipulator (CPM) with partially decoupled characteristics of XYZ translational motion is proposed in this paper. The CPM is driven by the selected piezoelectric actuators (PZTs) whose strokes are amplified by using the amplification lever mechanism. The design procedure of the CPM is presented in detail, and the CPM parasitic motion is studied analytically. Moreover, its motion properties are verified through the finite element analysis conducted with ANSYS software package. The simulation results reveal that the CPM has negligible parasitic rotations and negligible parasitic translation along one direction, and it possesses a good decoupled property. The CPM is expected to be applied to operate the objects in micro/nano-meter scales with high precision.

Keywords

finite element analysis; micromanipulators; piezoelectric actuators; ANSYS software package; CPM parasitic motion; XYZ translational motion; amplification lever mechanism; compliant parallel micromanipulator; finite element analysis; micro-meter scales; nano-meter scales; negligible parasitic rotations; negligible parasitic translation; partially decoupled high precision XYZ; piezoelectric actuators; Design engineering; Fasteners; Finite element methods; Kinematics; Manipulator dynamics; Micromanipulators; Motion analysis; Piezoelectric actuators; Software packages; Systems engineering and theory; decoupled motion; design theory; flexure hinges; parallel manipulators;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484277

Filename

4484277