DocumentCode
3232306
Title
Nanofabrication: Stimulus For Interdisciplinary Research
Author
Wolf, E.D. ; Galvin, G.J.
Author_Institution
Cornell University
fYear
1988
fDate
2-4 Nov. 1988
Firstpage
408
Lastpage
411
Keywords
Boolean functions; Chemical lasers; Data structures; Etching; Lithography; Nanofabrication; Nonlinear optics; Optical device fabrication; Optical devices; Particle beam optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1988. Conference Proceedings. LEOS '88.
Conference_Location
Santa Clara, CA, USA
Type
conf
DOI
10.1109/LEOS.1988.689867
Filename
689867
Link To Document