DocumentCode
3232373
Title
Electrostriction for thin films: an alternative to piezoelectricity?
Author
Defay, E. ; Cueff, M. ; Arndt, G. ; Ben Hassine, N.
Author_Institution
CEA LETI, Grenoble, France
fYear
2011
fDate
18-21 Oct. 2011
Firstpage
1320
Lastpage
1324
Abstract
In this paper, we discuss electrostriction in the special case of thin film for resonators and actuators. More specifically, we try to emphasize the differences between pure piezoelectric and electrostrictive materials. Several materials are investigated here as Pb(Zr,Ti)O3, (Ba,Sr)TiO3, LiNbO3 and even AlN, a pure piezoelectric material.
Keywords
III-V semiconductors; aluminium compounds; barium compounds; electrostriction; lead compounds; lithium compounds; piezoelectric thin films; strontium compounds; wide band gap semiconductors; (BaSr)TiO3; AlN; LiNbO3; PZT; electrostrictin; electrostrictive materials; piezoelectric material; piezoelectric materials; piezoelectricity; thin films; Acoustics; Couplings; Electric fields; Electrostriction; Materials; Piezoelectricity; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location
Orlando, FL
ISSN
1948-5719
Print_ISBN
978-1-4577-1253-1
Type
conf
DOI
10.1109/ULTSYM.2011.0326
Filename
6293533
Link To Document