• DocumentCode
    3232373
  • Title

    Electrostriction for thin films: an alternative to piezoelectricity?

  • Author

    Defay, E. ; Cueff, M. ; Arndt, G. ; Ben Hassine, N.

  • Author_Institution
    CEA LETI, Grenoble, France
  • fYear
    2011
  • fDate
    18-21 Oct. 2011
  • Firstpage
    1320
  • Lastpage
    1324
  • Abstract
    In this paper, we discuss electrostriction in the special case of thin film for resonators and actuators. More specifically, we try to emphasize the differences between pure piezoelectric and electrostrictive materials. Several materials are investigated here as Pb(Zr,Ti)O3, (Ba,Sr)TiO3, LiNbO3 and even AlN, a pure piezoelectric material.
  • Keywords
    III-V semiconductors; aluminium compounds; barium compounds; electrostriction; lead compounds; lithium compounds; piezoelectric thin films; strontium compounds; wide band gap semiconductors; (BaSr)TiO3; AlN; LiNbO3; PZT; electrostrictin; electrostrictive materials; piezoelectric material; piezoelectric materials; piezoelectricity; thin films; Acoustics; Couplings; Electric fields; Electrostriction; Materials; Piezoelectricity; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2011 IEEE International
  • Conference_Location
    Orlando, FL
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4577-1253-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2011.0326
  • Filename
    6293533