Maglev microrobotics: an approach toward highly integrated small-scale manufacturing systems

It is noted that current industrial robots are poorly suited to many of the payload, precision, and integration requirements of the semiconductor industry. A general mechanical technology, based on magnetically levitated microrobots, that may be better matched to semiconductor manufacturing needs is described. Magnetic levitation has favorable downward scaling laws and can be used to build multiple-degree-of-freedom drives capable of high speeds (15 to 25 moves/s) and high precision (1 μm or better) using small manipulators (0.5 cm). A major advantage of the magnetic designs that were studied theoretically and experimentally is that they allow the use of small-motion, multiple-degree-of-freedom precision devices for long-distance, one-degree-of-freedom transport. Preliminary experimental results indicate that these systems can be batch-fabricated using printed-circuit-board or other planar technologies. Other advantages of magnetic levitation technology include loose fabrication tolerances, robustness in adverse environments, and reduced particulate generation relative to conventional robots