DocumentCode
3233032
Title
MEMS based sensors for explosive detection: Development and discussion
Author
Kong, Deyi ; Qi, Yongguang ; Zhou, Lili ; Lin, Bingtao ; Li, Zhuang ; Zhu, Ronghua ; Chen, Chilai
Author_Institution
Inst. of Intell. Machines, Chinese Acad. of Sci., Hefei
fYear
2008
fDate
6-9 Jan. 2008
Firstpage
265
Lastpage
269
Abstract
In this paper, the development of explosive detection with MEMS technology was briefly reviewed. Various detecting methods were classified in microcalorimetric spectroscopy, optical displacement measuring, resonance frequency shift measuring, piezoresistive strain monitoring, heat absorption or release monitoring, and FA-IMS. Advantages and disadvantages of each method were respectively discussed.
Keywords
calorimeters; microsensors; piezoresistive devices; MEMS based sensors; heat absorption; microcalorimetric spectroscopy; optical displacement measurement; piezoresistive strain monitoring; resonance frequency shift measurement; Displacement measurement; Explosives; Frequency measurement; Micromechanical devices; Monitoring; Optical sensors; Resonance; Resonant frequency; Spectroscopy; Strain measurement; MEMS; explosive detection; sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location
Sanya
Print_ISBN
978-1-4244-1907-4
Electronic_ISBN
978-1-4244-1908-1
Type
conf
DOI
10.1109/NEMS.2008.4484332
Filename
4484332
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