Title :
Integrating bio-sensing functions on CMOS chips
Author :
Guiducci, C. ; Temiz, Y. ; Leblebici, Y. ; Accastelli, E. ; Ferretti, A. ; Cappi, G. ; Bianchi, E.
Author_Institution :
Lab. of Life Sci. Electron., EPFL, Lausanne, Switzerland
Abstract :
The paper discusses the recent achievements in the development of chips with integrated sensing of biomolecules. In particular, it focuses on integrated sensing electrodes on silicon and presents innovative solutions for the enhanced robustness of the electrodes towards cleaning processes and electrolytes. In this study, a microfabrication technology for 3D-integrated disposable chip layers that enables the reusability of the overall system for many times is presented.
Keywords :
CMOS integrated circuits; biomedical electrodes; biomedical electronics; biosensors; electrolytes; elemental semiconductors; microfabrication; molecular biophysics; silicon; three-dimensional integrated circuits; 3D-integrated disposable chip layer; CMOS chip; Si; biomolecules; biosensing function; cleaning process; electrolytes; integrated biosensor; integrated sensing electrode; microfabrication technology; Biosensors; CMOS integrated circuits; Electrodes; Metals; Silicon; Three dimensional displays; 3D-IC; biochips; integrated biosensors; post-processing; sensing electrodes;
Conference_Titel :
Circuits and Systems (APCCAS), 2010 IEEE Asia Pacific Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-7454-7
DOI :
10.1109/APCCAS.2010.5775088
