Title :
CMUTs with interlaced high- and low-frequency elements
Author :
Peiyu Zhang ; Wei Zheng ; Moussa, Walied ; Zemp, Roger J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
Abstract :
We demonstrate the potential of Capacitive Micromachined Ultrasound Transducers (CMUTs) for dual frequency transducer applications. We show that high and low-frequency elements may be interlaced in composite cells smaller than the shortest wavelength of ultrasound from the array. Feasibility devices are simulated, designed, and then fabricated using a modified sacrificial release process.
Keywords :
biomedical transducers; biomedical ultrasonics; capacitive sensors; ultrasonic transducer arrays; CMUT; capacitive micromachined ultrasound transducer; composite cell; dual frequency transducer; interlaced high-frequency element; interlaced low-frequency element; modified sacrificial release process; Arrays; Etching; Finite element methods; Imaging; Resonant frequency; Transducers; Ultrasonic imaging; 2D arrays; 3D ultrasound imaging; CMUTs; MEMS;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.6293584
