Design and fabrication of a novel tri-axis micro-gyroscope

Author

Tsai, Nan-Chyuan ; Sue, Chung-Yang ; Lin, Chih-Che

Author_Institution

Dept. of Mech. Eng., Nat. Cheng Kung Univ., Tainan

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

457

Lastpage

461

Abstract

This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.

Keywords

Coriolis force; finite element analysis; gyroscopes; micromechanical devices; Coriolis acceleration; beam deformation theory; coupling effect; finite element method; tri-axis angular motion detection; tri-axis microgyroscope; Acceleration; Electrodes; Fabrication; Finite element methods; Gyroscopes; Mathematical analysis; Mechanical engineering; Micromechanical devices; Semiconductor device measurement; Springs; Coriolis response; FEM; MEMS; micro-gyroscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484371

Filename

4484371