A new coplanar waveguide vector network analyzer for on-wafer measurements

Author

Bellantoni, J.V. ; Compton, R.C.

Author_Institution

Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA

fYear

1989

fDate

7-9 Aug 1989

Firstpage

201

Lastpage

207

Abstract

A new coplanar-waveguide network analyzer system that is specifically designed for on-wafer characterization of millimeter-wave devices and circuits is presented. The analyzer is made entirely in coplanar-waveguide to achieve large bandwidths and eliminate all discontinuities between the test set and wafer except the probe tip contacts. The analyzer is made by spacing detector diodes logarithmically along the coplanar-waveguide probe-tip to sample the signal, and it uses six-port theory to calculate complex scattering parameters. A 15.7-GHz prototype analyzer has been demonstrated

Keywords

MMIC; S-parameters; integrated circuit testing; microwave integrated circuits; microwave measurement; network analysers; semiconductor device testing; solid-state microwave circuits; solid-state microwave devices; test equipment; 15.7 GHz; CPW logarithmically-spaced detection diodes; MM-wave circuits; SHF; complex scattering parameters; coplanar waveguide vector network analyzer; microwave measurement; millimeter-wave devices; on-wafer characterization; probe-tip; six-port theory; Bandwidth; Circuit testing; Coplanar waveguides; Detectors; Diodes; Millimeter wave devices; Probes; Prototypes; Scattering parameters; Signal analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

High Speed Semiconductor Devices and Circuits, 1989. Proceedings., IEEE/Cornell Conference on Advanced Concepts in

Conference_Location

Ithaca, NY

Type

conf

DOI

10.1109/CORNEL.1989.79836

Filename

79836