DocumentCode
3234163
Title
Photonic metamaterials new opportunities for nanoimprint
Author
Feth, Nils ; Decker, Manuel ; Dolling, Gunnar ; Klein, Matthias W. ; Linden, Stefan ; Wegener, Martin
Author_Institution
Inst. fur Nanotechnol., Karlsruhe
fYear
2007
fDate
23-25 July 2007
Firstpage
76
Lastpage
77
Abstract
This article presents a short discussion on the fabrication of photonic metamaterials. The method of choice for fabricating metamaterials is still electron beam lithography despite its intrinsic drawbacks like long writing time and high operation costs. Thus only small areas can be structured within reasonable time and at reasonable costs. Another way to fabricate high-quality photonic metamaterials on a macroscopic scale is provided by interference lithography which allows structuring huge areas. Another promising technique to achieve large-scale, high-quality metamaterials is nanoimprint lithography, which was recently applied to fabricate photonic metamaterials.
Keywords
electron beam lithography; metamaterials; nanolithography; optical fabrication; optical materials; refractive index; soft lithography; electron beam lithography; interference lithography; nanoimprint lithography; photonic metamaterials; writing time; Interference; Lithography; Magnetic materials; Metamaterials; Optical materials; Optical refraction; Optical resonators; Optical variables control; Optimized production technology; Permeability;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location
Portland, OR
ISSN
1099-4742
Print_ISBN
1-4244-0926-8
Electronic_ISBN
1099-4742
Type
conf
DOI
10.1109/LEOSST.2007.4288339
Filename
4288339
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