• DocumentCode
    3234163
  • Title

    Photonic metamaterials new opportunities for nanoimprint

  • Author

    Feth, Nils ; Decker, Manuel ; Dolling, Gunnar ; Klein, Matthias W. ; Linden, Stefan ; Wegener, Martin

  • Author_Institution
    Inst. fur Nanotechnol., Karlsruhe
  • fYear
    2007
  • fDate
    23-25 July 2007
  • Firstpage
    76
  • Lastpage
    77
  • Abstract
    This article presents a short discussion on the fabrication of photonic metamaterials. The method of choice for fabricating metamaterials is still electron beam lithography despite its intrinsic drawbacks like long writing time and high operation costs. Thus only small areas can be structured within reasonable time and at reasonable costs. Another way to fabricate high-quality photonic metamaterials on a macroscopic scale is provided by interference lithography which allows structuring huge areas. Another promising technique to achieve large-scale, high-quality metamaterials is nanoimprint lithography, which was recently applied to fabricate photonic metamaterials.
  • Keywords
    electron beam lithography; metamaterials; nanolithography; optical fabrication; optical materials; refractive index; soft lithography; electron beam lithography; interference lithography; nanoimprint lithography; photonic metamaterials; writing time; Interference; Lithography; Magnetic materials; Metamaterials; Optical materials; Optical refraction; Optical resonators; Optical variables control; Optimized production technology; Permeability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
  • Conference_Location
    Portland, OR
  • ISSN
    1099-4742
  • Print_ISBN
    1-4244-0926-8
  • Electronic_ISBN
    1099-4742
  • Type

    conf

  • DOI
    10.1109/LEOSST.2007.4288339
  • Filename
    4288339