• DocumentCode
    3234257
  • Title

    Fabrication and characterization of all-diamond microprobes for electrochemical analysis

  • Author

    Chan, Ho-Yin ; Varney, Michael ; Aslam, Dean M. ; Wise, Kensall D.

  • Author_Institution
    Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI
  • fYear
    2008
  • fDate
    6-9 Jan. 2008
  • Firstpage
    532
  • Lastpage
    535
  • Abstract
    Fabrication and testing of all-diamond probes for electrochemical applications is reported for the first time. Polycrystalline diamond was used as the structural material of the probe. In addition, highly boron-doped (resistivity of ~10-3 Omegacm) diamond thin film was used as the electrode material for electrochemical analysis due to its excellent electrochemical properties and resistance to chemical attack. The diamond probe consists of 8 electrode sites ranging in size from 2 to 150 mum in diameter. The measured electrochemical potential window of the electrode was approximately 2.2 V wide (-0.8 to +1.4 V) in 1M KCI. Electrochemical characterization of the fabricated probe using ferri/ferrocyanide redox couple is also reported.
  • Keywords
    diamond; electrochemical analysis; electron probes; microelectrodes; production testing; thin films; all-diamond probes; boron-doped diamond thin films; electrochemical analysis; electrode materials; ferri/ferrocyanide redox couple; microprobes; probe fabrication; probe testing; size 2 mum to 150 mum; voltage -0.8 V to 1.4 V; Background noise; Capacitance; Electrodes; Fabrication; In vitro; Optical materials; Probes; Substrates; Testing; USA Councils; All-diamond probes; diamond thin film technology; neural probes; polycrystalline diamond;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
  • Conference_Location
    Sanya
  • Print_ISBN
    978-1-4244-1907-4
  • Electronic_ISBN
    978-1-4244-1908-1
  • Type

    conf

  • DOI
    10.1109/NEMS.2008.4484388
  • Filename
    4484388