DocumentCode
3234276
Title
Implantable Multichannel Silicon-based neural probe
Author
Weihua, Pei ; Hongda, Chen ; Ruoxin, Zhang ; Xiaohong, Sui ; Lin, Zhu ; Lin, Lu
Author_Institution
Tsinghua Univ., Beijing
fYear
2007
fDate
23-25 July 2007
Firstpage
90
Lastpage
91
Abstract
A kind of silicon oxide based multi-channel neural probe array is reported. It has four shafts and twenty recording sites. Processes to fabricate the microelectrode and test results were described.
Keywords
biological techniques; biomedical electrodes; microelectrodes; probes; prosthetics; silicon compounds; SiO2; implants; microelectrode; multichannel silicon-based neural probe; silicon oxide; Bonding; Electrodes; Fabrication; Frequency; Gold; Impedance; Microelectrodes; Probes; Silicon; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location
Portland, OR
ISSN
1099-4742
Print_ISBN
1-4244-0926-8
Electronic_ISBN
1099-4742
Type
conf
DOI
10.1109/LEOSST.2007.4288346
Filename
4288346
Link To Document