Title :
Implantable Multichannel Silicon-based neural probe
Author :
Weihua, Pei ; Hongda, Chen ; Ruoxin, Zhang ; Xiaohong, Sui ; Lin, Zhu ; Lin, Lu
Author_Institution :
Tsinghua Univ., Beijing
Abstract :
A kind of silicon oxide based multi-channel neural probe array is reported. It has four shafts and twenty recording sites. Processes to fabricate the microelectrode and test results were described.
Keywords :
biological techniques; biomedical electrodes; microelectrodes; probes; prosthetics; silicon compounds; SiO2; implants; microelectrode; multichannel silicon-based neural probe; silicon oxide; Bonding; Electrodes; Fabrication; Frequency; Gold; Impedance; Microelectrodes; Probes; Silicon; Testing;
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location :
Portland, OR
Print_ISBN :
1-4244-0926-8
Electronic_ISBN :
1099-4742
DOI :
10.1109/LEOSST.2007.4288346
