DocumentCode
3234503
Title
Dual mode cMUTs fabricated with LPCVD sacrificial release process
Author
Certon, Dominique ; Sénégond, Nicolas ; Gross, Dominique ; Legros, Mathieu ; Boulmé, Audren ; Roman, Benoit ; Teston, Franck ; Férin, Guillaume
Author_Institution
Univ. Francois Rabelais de Tours, Tours, France
fYear
2011
fDate
18-21 Oct. 2011
Firstpage
604
Lastpage
607
Abstract
This paper aims to develop an integrated dual mode ultrasonic transducers (based on cMUTs technology) for applications of targeted drug delivery dedicated to small animal experiments. Two functions are designed on the same transducer: one for high frequency imaging and the other for thermal activation of liposomes. Tests and performances evaluation are reported.
Keywords
biomedical ultrasonics; chemical vapour deposition; drug delivery systems; ultrasonic transducers; LPCVD sacrificial release process; dual mode cMUT fabrication; high frequency imaging; integrated dual mode ultrasonic transducers; liposomes; small animal experiments; targeted drug delivery; thermal activation; Acoustic arrays; Acoustics; Imaging; Impedance; Time frequency analysis; Ultrasonic imaging; Electroacoustic transducers; cMUT; drug delivery; therapeutic ultrasounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location
Orlando, FL
ISSN
1948-5719
Print_ISBN
978-1-4577-1253-1
Type
conf
DOI
10.1109/ULTSYM.2011.6293642
Filename
6293642
Link To Document