• DocumentCode
    3234503
  • Title

    Dual mode cMUTs fabricated with LPCVD sacrificial release process

  • Author

    Certon, Dominique ; Sénégond, Nicolas ; Gross, Dominique ; Legros, Mathieu ; Boulmé, Audren ; Roman, Benoit ; Teston, Franck ; Férin, Guillaume

  • Author_Institution
    Univ. Francois Rabelais de Tours, Tours, France
  • fYear
    2011
  • fDate
    18-21 Oct. 2011
  • Firstpage
    604
  • Lastpage
    607
  • Abstract
    This paper aims to develop an integrated dual mode ultrasonic transducers (based on cMUTs technology) for applications of targeted drug delivery dedicated to small animal experiments. Two functions are designed on the same transducer: one for high frequency imaging and the other for thermal activation of liposomes. Tests and performances evaluation are reported.
  • Keywords
    biomedical ultrasonics; chemical vapour deposition; drug delivery systems; ultrasonic transducers; LPCVD sacrificial release process; dual mode cMUT fabrication; high frequency imaging; integrated dual mode ultrasonic transducers; liposomes; small animal experiments; targeted drug delivery; thermal activation; Acoustic arrays; Acoustics; Imaging; Impedance; Time frequency analysis; Ultrasonic imaging; Electroacoustic transducers; cMUT; drug delivery; therapeutic ultrasounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2011 IEEE International
  • Conference_Location
    Orlando, FL
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4577-1253-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2011.6293642
  • Filename
    6293642