DocumentCode
3234590
Title
Design and fabrication of a MEMS-based multi-sensor
Author
Eun, Duk-Soo ; Kong, Dae-Young ; Yoo, Hyun-Jun ; Hong, Young-Myong ; Jang, Jong-Min ; Kang, Tae-Wook ; Yu, In-Sik ; Lee, Jong-Hyun
Author_Institution
Dept. of Electron., Kyungpook Nat. Univ., Daegu
fYear
2008
fDate
6-9 Jan. 2008
Firstpage
588
Lastpage
591
Abstract
In this paper, a newly-designed tamper detection multi-sensor with various functions is proposed. The multi-sensor consists of three different sensors, a piezoresistive sensor with and without mass, a proximity sensor, and a photodiode sensor, which use MEMS technology. The various components of the multi-sensor, could perceive different types of external tampers independently, resulting in more reliable responses. The multi-sensor could be applied to detect external tampers on various types of system and mobile units.
Keywords
microsensors; photodiodes; MEMS technology; photodiode sensor; piezoresistive sensor; proximity sensor; Capacitive sensors; Fabrication; Industrial training; Intelligent sensors; Mechanical sensors; Micromechanical devices; Photodiodes; Piezoresistance; Sensor systems; Vibrations; multi-sensor; photodiode sensor; piezoresistive sensor; proximity sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location
Sanya
Print_ISBN
978-1-4244-1907-4
Electronic_ISBN
978-1-4244-1908-1
Type
conf
DOI
10.1109/NEMS.2008.4484401
Filename
4484401
Link To Document