Title :
Electronics Produced by Roll-to-roll Self-Aligned Imprint Lithography
Author :
Jackson, W.B. ; Perlov, C. ; Amanza-Workman, M. ; Braymen, S. ; Chaiken, A. ; Jeffrey, F. ; Hauschildt, J. ; Jeans, A. ; Kwon, O. ; Luo, H. ; Mei, P. ; Taussig, C.
Author_Institution :
Hewlett Packard Labs., Palo Alto
Abstract :
In this presentation, we present a method for fabrication using self-aligned imprint lithography (SAIL). The self-aligned process solves the layer-to-layer registration issues arising from the dimensionally changes of flexible substrates. The imprint process eliminates the need for photolithography and greatly lowers the cost for large area electronics because it is compatible with roll-to-roll processing. The basic concepts of the SAIL process are presented along with electrical characteristics of devices produced by roll-to-roll SAIL processes.
Keywords :
nanolithography; photolithography; substrates; SAIL process; electrical characteristics; flexible substrates; layer-to-layer registration; photolithography; roll-to-roll processing; self-aligned imprint lithography; Chromium; Etching; Fabrication; Flexible electronics; Laboratories; Lithography; Milling machines; Optical polymers; Organic light emitting diodes; Polyimides;
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location :
Portland, OR
Print_ISBN :
1-4244-0926-8
Electronic_ISBN :
1099-4742
DOI :
10.1109/LEOSST.2007.4288364