• DocumentCode
    3234739
  • Title

    Soft Lithographic Fabrication of Microresonators

  • Author

    Armani, A.M. ; Vahala, K.J.

  • Author_Institution
    California Inst. of Technol., Pasadena
  • fYear
    2007
  • fDate
    23-25 July 2007
  • Firstpage
    133
  • Lastpage
    134
  • Abstract
    Using ultra-high-Q toroid microcavity masters, soft lithography is applied to fabricate polymer microcavity arrays with Q factors in excess of 106 . This technique produces resonators with material-limited quality factors.
  • Keywords
    Q-factor; microcavities; micromechanical resonators; polymers; soft lithography; Q factors; microresonators; polymer microcavity arrays; soft lithography; toroid microcavity masters; Fabrication; Loss measurement; Microcavities; Optical polymers; Optical resonators; Optical scattering; Optical surface waves; Q factor; Q measurement; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
  • Conference_Location
    Portland, OR
  • ISSN
    1099-4742
  • Print_ISBN
    1-4244-0926-8
  • Electronic_ISBN
    1099-4742
  • Type

    conf

  • DOI
    10.1109/LEOSST.2007.4288368
  • Filename
    4288368
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3234739