Compact-sized excimer laser with two-sides preionization

Compact-sized monopulse excimer laser with foot-print equal to only 250×80 mm², total height 250 mm and beam axis height 50 mm was designed. Output energy at wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate - 1-2 pulses per second, beam divergence - 8 miliradians. Such small foot-print, small axis height of beam in combination with low weight of laser (5 kg) allow them to be used in various optical schemes, where traditional, typical bulky ecximer lasers are unapplicable. Moreover, small dimensions, low weight in combination with low energy consumption (a few Wts) allow them to be used in clear “field” conditions. Beside abovementioned designed laser differs from traditional ones by two-sides preionization: “spark” near “hot” massive electrode and so called “capacitive” or “barrier” under ground grid one. Such a two-sides preionization provides both igniting and sustaining of wider discharge thus allowing to reach beam with higher simmetry - its cross-section is 15×20 mm².