Title :
Technology changes in the field of sensors
Author_Institution :
Siemens AG, Munich, West Germany
Abstract :
Summary form only given. The history and current status of sensor technology are reviewed. It is predicted that modern technologies such as thin- or thick-film fabrication or silicon process technology will initiate evolutional processes rather than a revolution of silicon sensors, with classical sensors and their silicon counterparts sharing future applications (the latter for mass applications: the former for special purposes where delicate specifications or environmental conditions cannot be met by the physical properties of silicon)
Keywords :
electric sensing devices; history; semiconductor devices; thick film devices; thin film devices; Si; current status; history; sensor technology; silicon process technology; silicon sensors; thick-film fabrication; thin-film fabrication; Acoustic sensors; Chemical sensors; Consumer electronics; Intelligent sensors; Mechanical sensors; Microprocessors; Production; Silicon; Thick films; Wire;
Conference_Titel :
CompEuro '89., 'VLSI and Computer Peripherals. VLSI and Microelectronic Applications in Intelligent Peripherals and their Interconnection Networks', Proceedings.
Conference_Location :
Hamburg
Print_ISBN :
0-8186-1940-6
DOI :
10.1109/CMPEUR.1989.93324
