• DocumentCode
    3235578
  • Title

    Mode shape and failure analysis of high frequency MEMS/NEMS using Raman Spectroscopy

  • Author

    Hedley, John ; Hu, Zhongxu ; Arce-Garcia, Isabel ; Gallacher, Barry J.

  • Author_Institution
    Sch. of Mech. & Syst. Eng., Newcastle Univ., Newcastle upon Tyne
  • fYear
    2008
  • fDate
    6-9 Jan. 2008
  • Firstpage
    842
  • Lastpage
    846
  • Abstract
    This paper reports on the use of Raman spectroscopy to characterize the motion of high frequency MEMS/NEMS. The change in Raman signal from a device driven into resonance at 101 KHz was used to indicate the mode shape at that frequency and the strain induced during the oscillation. The results are in good agreement with a finite element model of the structure. The results were also used to predict device failure during excessive vibration.
  • Keywords
    Raman spectroscopy; failure analysis; finite element analysis; micromechanical devices; nanotechnology; MEMS; NEMS; Raman signal; Raman spectroscopy; failure analysis; finite element model; mode shape; Capacitive sensors; Failure analysis; Finite element methods; Frequency; Micromechanical devices; Nanoelectromechanical systems; Raman scattering; Resonance; Shape; Spectroscopy; MEMS characterization; Raman spectroscopy; failure analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
  • Conference_Location
    Sanya
  • Print_ISBN
    978-1-4244-1907-4
  • Electronic_ISBN
    978-1-4244-1908-1
  • Type

    conf

  • DOI
    10.1109/NEMS.2008.4484455
  • Filename
    4484455
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3235578