Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever

Author

Saha, Shimul Chandra ; Hanke, Ulrik ; Jensen, Geir Uri ; Saether, Trond

Author_Institution

Dept. of Electron. & Telecommun., Norwegian Univ. of Sci. & Technol., Trondheim

fYear

2006

fDate

14-15 Sept. 2006

Firstpage

56

Lastpage

60

Abstract

In this paper, we are going to present a model of spring constant and pull down voltage for non uniform RF MEMS cantilever. In order to reduce the pull down voltage, it is usual to use a beam, which is narrower close to anchor and wider at the end or electrode area for a cantilever. Compare to uniform beam, this beam have lower spring constant which reduce the pull down voltage. A comprehensive model for spring constant and pull down voltage of the nonuniform cantilever is developed through basic force deflection mechanism of the suspended beam

Keywords

beams (structures); cantilevers; elastic constants; microswitches; force deflection mechanism; nonuniform RF MEMS cantilever; pull-down voltage; spring constant modeling; suspended beam; Bridge circuits; Contacts; Educational institutions; Electrodes; Electrostatics; Radiofrequency microelectromechanical systems; Springs; Structural beams; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Behavioral Modeling and Simulation Workshop, Proceedings of the 2006 IEEE International

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9742-8

Type

conf

DOI

10.1109/BMAS.2006.283470

Filename

4062052