A 20kw 6KHz PRF compact water cooled supply for high repetition rate excimer lasers

Author

Bees, G.L. ; Tydeman, A.

Author_Institution

Lambda Americas Inc., Neptune, NJ

fYear

2004

fDate

23-26 May 2004

Firstpage

75

Lastpage

78

Abstract

As integrated circuit feature size maintains pace with Moore´s law, the demands of DUV light sources and excimer lasers grow ever more challenging. Each DUV excimer laser requires a power supply capable of delivering rapid, and accurate, high voltage pulses at extremely high repetition rates. This paper presents a new design of power supply that can deliver 20 kW average power at voltages up to 2500 V, repetition rates up to 6 kHz, and pulse-to-pulse stability a low as plusmn1.25 Volts

Keywords

excimer lasers; pulsed power supplies; ultraviolet sources; 20 kW; 6 kHz; DUV light sources; Moore law; PRF compact; deep UV light sources; excimer laser; high voltage pulse; integrated circuit; power supply design; pulse recurrence frequency; pulse-to-pulse stability; water cooled supply; Bridge circuits; Circuit topology; Inductors; Power lasers; Power supplies; Pulsed power supplies; Resonance; Stability; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop. Conference Record of the Twenty-Sixth International

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-8586-1

Type

conf

DOI

10.1109/MODSYM.2004.1433510

Filename

1433510