Model research and features simplification for scheduling of wafer fabrication system

Author

Wang, Ying ; Lin, Zhixian ; Li, Maoqing

Author_Institution

Dept. of Autom., Xiamen Univ., Xiamen, China

fYear

2009

fDate

25-28 July 2009

Firstpage

208

Lastpage

212

Abstract

Scheduling of wafer fabrication system with machine failures and repair time is studied by Neuro-dynmamic programming in this paper. States set and scheduling set are constructed, state transition probability is deduced and dynamic programming model with closed-release policy is analyzed. Key features are derived by simplification of non-bottleneck stations, and then scheduling policy can be obtained by approximation of optimization cost function with simulation. TRC model of HP is scheduled to illustrate the validity of the method.

Keywords

dynamic programming; dynamic scheduling; manufacturing systems; production engineering computing; dynamic programming model; neuro-dynamic programming; nonbottleneck stations; optimization cost function; scheduling set; state transition probability; states set; wafer fabrication system; Dynamic programming; Dynamic scheduling; Electric breakdown; Fabrication; Job shop scheduling; Optimization methods; Processor scheduling; Programming profession; Semiconductor device modeling; Workstations; Neuro-dynamic Programming; Scheduling; wafer fabrication system;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer Science & Education, 2009. ICCSE '09. 4th International Conference on

Conference_Location

Nanning

Print_ISBN

978-1-4244-3520-3

Electronic_ISBN

978-1-4244-3521-0

Type

conf

DOI

10.1109/ICCSE.2009.5228491

Filename

5228491