A new type of MEMS two axis accelerometer based on silicon

Author

Chen, Shang ; Xue, Chenyang ; Zhang, Wendong ; Xiong, Jijun ; Zhang, Binzhen ; Hu, Jie

Author_Institution

Nat. Key Lab. for Electron. Meas. Technol., North Univ. of China, Taiyuan

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

959

Lastpage

964

Abstract

A new type of MEMS two axis accelerometer based on silicon is presented in this paper. This kind of sensor consists of four vertical cantilever beams with an attached cylinder in the center of the structure. By locating the resistors logically formed the Wheatstone bridge; this sensor can detect acceleration in two direction. It is desirable that the application of ingenious structure of the accelerometer may improve the sensitivity. The mechanical model and piezoresistive effect are used to analyse the sensitivity characteristic of the novel structure. The fabrication is completed using MEMS technology. The test results are presented at last. The experiment results show that both the two direction of the accelerometer have high sensitivity and good linearity. The sensitivity of the accelerometer for X direction is 1.017 mv/g and Y is 0.898 mv/g, the linearity of the X direction is 0.99991 and Y is 0.99945. The frequency response gives a straight and smooth line and the measured resonance frequency is about 670 Hz.

Keywords

accelerometers; cantilevers; microsensors; piezoresistance; silicon; MEMS accelerometer; MEMS technology; Si; Wheatstone bridge; frequency response; ingenious structure; mechanical model; microsensor; piezoresistive effect; two axis accelerometer; vertical cantilever beams; Acceleration; Accelerometers; Bridge circuits; Linearity; Mechanical sensors; Micromechanical devices; Resistors; Sensor phenomena and characterization; Silicon; Structural beams; MEMS; high sensitivity; silicon; two axis accelerometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484481

Filename

4484481