A new type of MEMS two axis accelerometer based on silicon

A new type of MEMS two axis accelerometer based on silicon is presented in this paper. This kind of sensor consists of four vertical cantilever beams with an attached cylinder in the center of the structure. By locating the resistors logically formed the Wheatstone bridge; this sensor can detect acceleration in two direction. It is desirable that the application of ingenious structure of the accelerometer may improve the sensitivity. The mechanical model and piezoresistive effect are used to analyse the sensitivity characteristic of the novel structure. The fabrication is completed using MEMS technology. The test results are presented at last. The experiment results show that both the two direction of the accelerometer have high sensitivity and good linearity. The sensitivity of the accelerometer for X direction is 1.017 mv/g and Y is 0.898 mv/g, the linearity of the X direction is 0.99991 and Y is 0.99945. The frequency response gives a straight and smooth line and the measured resonance frequency is about 670 Hz.