Title :
CVD diamond for cold cathode applications
Author :
Tzeng, Y. ; Liu, C. ; Liu, Y.K. ; Cheng, A.J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Auburn Univ., AL
Abstract :
Microcrystalline and nanocrystalline diamond coatings grown by microwave plasma enhanced chemical vapor deposition (CVD) techniques are examined for their properties for applications as cold cathodes. Low-field electron field emission and high-yield secondary electron emission are promising properties of diamond and for applications to power modulators
Keywords :
diamond; electron field emission; modulators; nanostructured materials; plasma CVD coatings; secondary electron emission; CVD diamond; cold cathode applications; high-yield secondary electron emission; low-field electron field emission; microcrystalline diamond coatings; microwave plasma enhanced chemical vapor deposition; nanocrystalline diamond coatings; power modulators; Application software; Cathodes; Chemical vapor deposition; Coatings; Electron emission; Hydrogen; Plasma chemistry; Plasma properties; Substrates; Surface cleaning;
Conference_Titel :
Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop. Conference Record of the Twenty-Sixth International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8586-1
DOI :
10.1109/MODSYM.2004.1433579
