60 GHz ultra low phase noise sige common base oscillator using a wirebond coupled mcm integrated micromachined cavity resonator

This paper reports on a 60 GHz common base fundamental oscillator with ultra low phase noise realized in QUBIC4Xpsilas HBT technology. It uses a silicon micromachined cavity resonator which is mounted on a common MCM PASSI3I carrier and coupled to the MMIC. A novel feed approach is presented which uses a wirebond to couple the interconnecting CPW line to the KOH-etched silicon cavity of which the advantages are ease of manufacture and reduced substrate effects compared to other coupling approaches. Oscillator measurement results for the stand-alone MMIC are presented and compared to 2.5D/3D simulations. The important effect of wirebond shape variability is quantified in terms of oscillation frequency, output power and phase noise.