Title :
Optimization Approaches of Multizone Furnace Loading Process Control
Author :
Pasichnyk, R. ; Wouwer, A. Vande ; Pigovsky, Y.
Author_Institution :
Ternopil State Econ. Univ., Ternopil
Abstract :
An algorithm for optimal heat treatment in a multizone diffusive furnace is proposed. A mathematical model of the furnace is developed and a performance criterion is defined. This latter criterion is minimized using a procedure based on the simultaneous perturbation stochastic approximation (SPSA) algorithm as well as with the MatLab FMINBND algorithm. Problem simplifications are also considered. Simulation results are discussed.
Keywords :
furnaces; heat treatment; optimisation; process control; semiconductor device manufacture; stochastic processes; temperature control; MatLab FMINBND algorithm; multizone diffusive furnace; multizone furnace loading process control; optimal heat treatment; optimization; perturbation stochastic approximation algorithm; Approximation algorithms; Crystals; Furnaces; Heat treatment; Mathematical model; Metallization; Process control; Silicon; Space heating; Temperature; temperature control; thermal system;
Conference_Titel :
Intelligent Data Acquisition and Advanced Computing Systems: Technology and Applications, 2005. IDAACS 2005. IEEE
Conference_Location :
Sofia
Print_ISBN :
0-7803-9445-3
Electronic_ISBN :
0-7803-9446-1
DOI :
10.1109/IDAACS.2005.283040
