Title :
Taguchi methods in LSI fabrication process
Author :
Taguchi, Genichi
Author_Institution :
Ohken Associates, Tokyo, Japan
Abstract :
The concept of robust engineering is based on the principles of Taguchi methods. Genichi Taguchi derived these principles after several years of research. The concept systematically evolved starting from 1950s. These principles are aimed at providing the companies with a cost effective methodology to enhance their competitive position in the global market. Three case studies related to semiconductor fabrication process are presented. The first case study is a hardware experiment, the second case study is related to simulation and the third case study is related to the Mahalanobis-Taguchi system
Keywords :
Taguchi methods; digital simulation; integrated circuit manufacture; large scale integration; semiconductor process modelling; LSI fabrication process; Mahalanobis-Taguchi system; Taguchi methods; global market; hardware experiment; robust engineering; semiconductor fabrication process; simulation; Circuits; Fabrication; Globalization; Large scale integration; Noise level; Noise robustness; Reliability engineering; Signal to noise ratio; Strontium; Temperature;
Conference_Titel :
Statistical Methodology, IEEE International Workshop on, 2001 6yh.
Conference_Location :
Kyoto
Print_ISBN :
0-7803-6688-3
DOI :
10.1109/IWSTM.2001.933815
