Micro-electro-mechanical systems projects at Lawrence Livermore National Laboratory

The Lawrence Livermore National Laboratory (LLNL) MicroTechnology Center has developed a wide variety of special capabilities used to design, build and test MEMS (Micro-Electro-Mechanical Systems). Our customers are both the LLNL Programs and a variety of external customers. Typical applications include: custom microstructures for scientific experiments; physical sensors; photonics; miniature tools for catheter-based surgery; and microinstruments for chemical analysis for biomedicine, environment, and treaty verification. The majority of our prototype MEMS devices are fabricated with bulk silicon micromachining, but we also utilize surface micromachining capabilities