Title :
MEMS commercialization activities at MCNC
Author :
Markus, K.W. ; Walters, M.
Abstract :
Both Multi-user MEMS processes (MUMPs) and Smart MEMS processes have been developed and implemented at MCNC in cooperation with ARPA, as part of an ongoing program of MEMS Infrastructure development. It is hoped that by lowering the barriers to accessing MEMS technology, both cost and availability, the domestic user community will be able to implement their ideas and take advantage of the revolution in technology that MEMS can afford
Keywords :
Commercialization; Costs; Educational institutions; Electronics industry; Integrated circuit technology; Micromechanical devices; Prototypes; Silicon; Thermal conductivity; Thermal expansion;
Conference_Titel :
WESCON/'95. Conference record. 'Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies'
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-2636-9
DOI :
10.1109/WESCON.1995.485297
