DocumentCode
3241865
Title
IntelliCAD: the CAD for MEMS
Author
Maseeh, Fariborz
fYear
1995
fDate
7-9 Nov. 1995
Firstpage
320
Abstract
The absence of manufacturing know-how in an accessible and useful form explains much of micromanufacturer´s inability to supply the existing demand for microelectromechanical system(s) (MEMS). IntelliCAD is an integrated software tool that simulates the design and manufacturing of MEMS and the mechanical aspects of semiconductor structures. The aim of IntelliCAD is to fill the gap in microfabrication know-how and to reduce timely process iterations by first mimicking them on a workstation. IntelliCAD allows a single user or a group of users to design, fabricate, visualize, and test the performance of a device in a completely integrated environment
Keywords
Automotive engineering; Biosensors; Costs; Fabrication; Manufacturing; Micromechanical devices; Semiconductor device manufacture; Silicon; Testing; Workstations;
fLanguage
English
Publisher
ieee
Conference_Titel
WESCON/'95. Conference record. 'Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies'
Conference_Location
San Francisco, CA, USA
ISSN
1095-791X
Print_ISBN
0-7803-2636-9
Type
conf
DOI
10.1109/WESCON.1995.485298
Filename
485298
Link To Document