• DocumentCode
    3241865
  • Title

    IntelliCAD: the CAD for MEMS

  • Author

    Maseeh, Fariborz

  • fYear
    1995
  • fDate
    7-9 Nov. 1995
  • Firstpage
    320
  • Abstract
    The absence of manufacturing know-how in an accessible and useful form explains much of micromanufacturer´s inability to supply the existing demand for microelectromechanical system(s) (MEMS). IntelliCAD is an integrated software tool that simulates the design and manufacturing of MEMS and the mechanical aspects of semiconductor structures. The aim of IntelliCAD is to fill the gap in microfabrication know-how and to reduce timely process iterations by first mimicking them on a workstation. IntelliCAD allows a single user or a group of users to design, fabricate, visualize, and test the performance of a device in a completely integrated environment
  • Keywords
    Automotive engineering; Biosensors; Costs; Fabrication; Manufacturing; Micromechanical devices; Semiconductor device manufacture; Silicon; Testing; Workstations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    WESCON/'95. Conference record. 'Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies'
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    1095-791X
  • Print_ISBN
    0-7803-2636-9
  • Type

    conf

  • DOI
    10.1109/WESCON.1995.485298
  • Filename
    485298