Title :
Large area sensors with amorphous silicon
Author :
Einzinger, Richard
Author_Institution :
Siemens AG, Munchen, West Germany
Abstract :
The field of large-area electronics (LAE) based on amorphous silicon is in rapid evolution. Besides solar cells and flat active-matrix displays, increasing applications for document scanners exist in the fields of computer peripherals and in telecommunications. The author deals with application-relevant properties of amorphous silicon and its deposition technique, describes the electronic thin-film components used in large-area sensors, and outlines current concepts of hybrid and integrated scanning devices. LAE document readers are currently produced in a linear pixel arrangement. With increasing yield potential, mainly stimulated by the manufacture of active matrix LED displays, the two-dimensional area sensor is becoming technically and economically feasible
Keywords :
amorphous semiconductors; electric sensing devices; elemental semiconductors; silicon; thin film devices; Si; amorphous silicon; deposition technique; document readers; document scanners; electronic thin-film components; large area sensors; large-area electronics; linear pixel arrangement; Active matrix technology; Amorphous silicon; Application software; Computer displays; Computer peripherals; Photovoltaic cells; Semiconductor thin films; Sputtering; Thin film devices; Thin film sensors;
Conference_Titel :
CompEuro '89., 'VLSI and Computer Peripherals. VLSI and Microelectronic Applications in Intelligent Peripherals and their Interconnection Networks', Proceedings.
Conference_Location :
Hamburg
Print_ISBN :
0-8186-1940-6
DOI :
10.1109/CMPEUR.1989.93399
