High sensitive surface micromachined out of plane tunneling accelerometers with low-g resolution

The paper presents design, fabrication and performance analysis of out-of-plane tunneling accelerometers of different configurations. The tunneling structures have been realized by standard surface micromachined process. This work also records the relative performance of the devices to achieve high sensitivity, high dynamic range and low cross axis sensitivity for sub dasiagpsila measurement at relatively low actuation voltage.