DocumentCode
3245590
Title
Dependence of properties of amorphous Co-Zr films on plasma state in sputtering
Author
Takahashi, T. ; Naoe, M.
Author_Institution
Toyama University
fYear
1989
fDate
28-31 March 1989
Keywords
Amorphous materials; Magnetic confinement; Magnetic films; Plasma confinement; Plasma properties; Plasma temperature; Power engineering and energy; Sputtering; Substrates; Toroidal magnetic fields;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location
Washington, DC, USA
Type
conf
DOI
10.1109/INTMAG.1989.689967
Filename
689967
Link To Document