DocumentCode :
3245590
Title :
Dependence of properties of amorphous Co-Zr films on plasma state in sputtering
Author :
Takahashi, T. ; Naoe, M.
Author_Institution :
Toyama University
fYear :
1989
fDate :
28-31 March 1989
Keywords :
Amorphous materials; Magnetic confinement; Magnetic films; Plasma confinement; Plasma properties; Plasma temperature; Power engineering and energy; Sputtering; Substrates; Toroidal magnetic fields;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
Type :
conf
DOI :
10.1109/INTMAG.1989.689967
Filename :
689967
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3245590
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