Title :
A runout measurement technology with nanometer resolution for applications in hard disk drives
Author :
Huang, J.C. ; Bi, C.
Author_Institution :
Data Storage Inst., Singapore, Singapore
Abstract :
Hard disk production needs accurate and fast measurement technology to qualify the spindle system produced. This paper presents several new technologies to measure the runout of spindle motor used in hard disk drives. The limitations of these technologies in the precise measurement are analyzed in the paper. The testing results show that, the technology utilizing optical interference is a good approach to realize 1 nano meter accuracy with high measuring speed. The experimental studies on different type micro motor are also presented.
Keywords :
disc drives; hard discs; hard disk drives; hard disk production; nanometer resolution; precise measurement; runout measurement; spindle motor; spindle system; Capacitors; Hard disks; Interference; Micromotors; Pattern recognition; Probes; Production systems; Spatial resolution; Velocity measurement; Wavelength measurement; Spindle motor; interference; nanometer; resolution; runout; vision;
Conference_Titel :
Advanced Intelligent Mechatronics, 2009. AIM 2009. IEEE/ASME International Conference on
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2852-6
DOI :
10.1109/AIM.2009.5229960
