Title :
Semiconductor equipment assessment - An enabler for production ready equipment
Author :
Pfeffer, M. ; Pfitzner, L. ; Bauer, A.
Author_Institution :
Fraunhofer Inst. for Integrated Syst. & Device Technol. (IISB), Erlangen, Germany
Abstract :
A detailed presentation of history, recent and current projects in the area of Semiconductor Equipment Assessment in Europe were presented. The topics and objectives of the ongoing equipment assessments within the SEA4KET framework were described. The importance on a horizontal and vertical collaboration in a global perspective was elaborated.
Keywords :
integrated circuit manufacture; production equipment; Europe; IC manufacturing; SEA4KET framework; horizontal collaboration; production ready equipment; semiconductor equipment assessment; vertical collaboration; Collaboration; Europe; Integrated circuits; Manufacturing; Metrology; Production; Silicon carbide;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI
Conference_Location :
Saratoga Springs, NY
DOI :
10.1109/ASMC.2015.7164498
