Title :
A bulk-micromachined comb vibratory microgyroscope design
Author :
Xiong, Xingguo ; Lu, Deren ; Wang, Weiyuan
Author_Institution :
Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA
Abstract :
In this paper, DRIE (deep reactive ion etching) bulk-micromachined single-crystal silicon comb vibratory microgyroscope is introduced. The device uses glass as substrate so that parasitic capacitance can be alleviated. Due to DRIE technique the device thickness can be increased to be more than 100μm. The working principle of the microgyroscope is introduced. The dynamics analysis of the gyroscope is also performed. Based upon the analysis, an optimized microgyroscope design is proposed. The designed gyroscope is expected to have a sensitivity of 4nm/(°/sec).
Keywords :
glass; gyroscopes; micromachining; micromechanical devices; sputter etching; DRIE process; bulk micromachining; comb vibratory microgyroscope; deep reactive ion etching; glass substrate; parasitic capacitance; Bonding; Electrostatics; Etching; Fingers; Glass; Gyroscopes; Micromechanical devices; Parasitic capacitance; Resonant frequency; Silicon;
Conference_Titel :
Circuits and Systems, 2005. 48th Midwest Symposium on
Print_ISBN :
0-7803-9197-7
DOI :
10.1109/MWSCAS.2005.1594061
