Title :
Beam quality and thermal stability in field emitter arrays
Author :
Liu, Y.F. ; Lau, Y.Y.
Author_Institution :
Dept. of Nucl. Eng., Michigan Univ., Ann Arbor, MI, USA
fDate :
July 30 1995-Aug. 3 1995
Abstract :
Summary form only given, as follows. The emerging field of vacuum microelectronics offers exciting possibilities in miniature coherent radiation sources, flat panel displays, and ultra-fast logic circuits. The crucial component is the electron emitter, which consists of an array of sharp tips from which electrons undergo field emission according to the Fowler-Nordheim (FN) relation. In this paper, we present a theoretical analysis of the beam emittance and of the beam brightness expected from a field emitter array. Scaling laws for these quantities are constructed that take into account the electric field enhancement factors that accompany the sharp tips, and they are derived in a manner consistent with the FN relation. These scaling laws can be used immediately once the following parameters are given: the width and height, as well as the packing density, of the field emitter array, the anode-cathode (A-K) spacing, the A-K voltage drop, and the FN coefficients A, and B. Results of the ongoing study of the thermal stability of field emitters are reported.
Keywords :
brightness; electron field emission; thermal stability; vacuum microelectronics; Fowler-Nordheim relation; anode-cathode spacing; beam brightness; beam emittance; beam quality; electric field enhancement factors; electron emitter; field emission; field emitter arrays; packing density; scaling laws; sharp tips; thermal stability; vacuum microelectronics; voltage drop; Brightness; Circuit stability; Electron emission; Electron guns; Field emitter arrays; Flat panel displays; Logic circuits; Microelectronics; Thermal stability; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.486996