DocumentCode
3250979
Title
Diffusion tip shaping under vacuum breakdown
Author
Eremchenko, D. ; Makhov, V.I. ; Shulgin, E.I. ; Fedirko, V.A.
Author_Institution
Res. Inst. of Phys. Problems, Zelenograd, Russia
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
92
Abstract
Summary form only given. Surface self-diffusion is an essential process initiating vacuum breakdown. It builds up microtips which leads to electric field and current density enhancement up to the threshold values. Using the Herring expression for chemical potential, tip surface point displacement may be calculated. When the maximum displacement point of the surface coincides with the maximum curvature point the drain condition is fulfilled. We find that for a needle-like tip stable build up is realized at a field about 1.5 higher then that given by the Dyke formula. This is just the condition for vacuum breakdown threshold to be achieved.
Keywords
chemical potential; surface diffusion; vacuum breakdown; Dyke formula; Herring formula; chemical potential; curvature point; displacement point; microtip shaping; surface self-diffusion; vacuum breakdown; Vacuum breakdown;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.486998
Filename
486998
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