• DocumentCode
    3250979
  • Title

    Diffusion tip shaping under vacuum breakdown

  • Author

    Eremchenko, D. ; Makhov, V.I. ; Shulgin, E.I. ; Fedirko, V.A.

  • Author_Institution
    Res. Inst. of Phys. Problems, Zelenograd, Russia
  • fYear
    1995
  • fDate
    July 30 1995-Aug. 3 1995
  • Firstpage
    92
  • Abstract
    Summary form only given. Surface self-diffusion is an essential process initiating vacuum breakdown. It builds up microtips which leads to electric field and current density enhancement up to the threshold values. Using the Herring expression for chemical potential, tip surface point displacement may be calculated. When the maximum displacement point of the surface coincides with the maximum curvature point the drain condition is fulfilled. We find that for a needle-like tip stable build up is realized at a field about 1.5 higher then that given by the Dyke formula. This is just the condition for vacuum breakdown threshold to be achieved.
  • Keywords
    chemical potential; surface diffusion; vacuum breakdown; Dyke formula; Herring formula; chemical potential; curvature point; displacement point; microtip shaping; surface self-diffusion; vacuum breakdown; Vacuum breakdown;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
  • Conference_Location
    Portland, OR, USA
  • Print_ISBN
    0-7803-2143-X
  • Type

    conf

  • DOI
    10.1109/IVMC.1995.486998
  • Filename
    486998