Title :
Study of shaping super long tungsten filament array
Author :
Chang-Chun Zhu ; Guang-Yi Liu ; Ning Chen ; Wu-Yuan Cui ; Jun-Hua Liu
Author_Institution :
Inst. of VME & MEMS, Xi´an Jiaotong Univ., China
fDate :
July 30 1995-Aug. 3 1995
Abstract :
In this paper, we reported three methods of making ohmic contact of the tungsten filament cathode array with the glass as the medium. Also, two shaping techniques of the tungsten filament cathode array were mentioned. Finally, we showed the SEM pictures of the shaping results.
Keywords :
cathodes; electron field emission; etching; ohmic contacts; tungsten; vacuum microelectronics; SEM; W; W filament cathode array; field emitter array; glass; ohmic contact formation; shaping techniques; super long filament array; Anodes; Cathodes; Conductive films; Copper; Electrodes; Electrons; Etching; Glass; Tungsten; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487016
