Frequency analysis of integrated micromachined inductive microphone

Author

Jallouli, M.E. ; Tounsi, F. ; Mezghani, B. ; Smaoui, S. ; Masmoudi, M.

Author_Institution

Res. Group on Microtechnol. & Syst. on Chip, Sfax, Tunisia

fYear

2004

fDate

6-8 Dec. 2004

Firstpage

202

Lastpage

205

Abstract

This paper is focused on frequency analysis of integrated micromachined inductive microphone. It is a very important step in the conception of integrated sensors. The concept of this new structure is based on the variation of mutual inductance between an external fixed inductor and an internal suspended inductor. The internal inductor is fabricated on top of a suspended membrane. Our goal is to increase the resonant frequencies of the suspended structure. We propose a new model of a membrane to the monolithic CMOS integrated inductive microphone. We studied the dynamic response. The choice of the new model is derived and discussed. The frequencies and the associated mode shapes determined by finite element analysis using SOLIDWORKS and COSMOSWORKS with technology AMS 0.8 μm, are described. The purpose is to demonstrate a sensibility of the microphone.

Keywords

CMOS integrated circuits; dynamic response; electronic engineering computing; finite element analysis; inductance; micromachining; microphones; 0.8 micron; AMS technology; COSMOSWORKS; SOLIDWORKS; dynamic response; external fixed inductor; finite element analysis; frequency analysis; integrated micromachined inductive microphone; integrated sensors; internal suspended inductor; monolithic CMOS integrated inductive microphone; mutual inductance; resonant frequency; Biomembranes; CMOS process; CMOS technology; Fabrication; Frequency; Inductance; Inductors; Microphones; Semiconductor device modeling; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2004. ICM 2004 Proceedings. The 16th International Conference on

Print_ISBN

0-7803-8656-6

Type

conf

DOI

10.1109/ICM.2004.1434245

Filename

1434245