Title :
Analysis of vacuum microelectronic components by the use of special finite elements
Author :
Kopka, P. ; Ermert, H.
Author_Institution :
Dept. of Electr. Eng., Ruhr-Univ., Bochum, Germany
fDate :
July 30 1995-Aug. 3 1995
Abstract :
For vacuum microelectronic devices special finite elements have been introduced which are able to describe field enhancements near cone emitters with small radius of emitter curvature in an effective way. Compared to conventional methods, simulations using these elements can be carried out more precisely and with less computer time and storage.
Keywords :
finite element analysis; vacuum microelectronics; cone emitters; electric field enhancement; finite element simulation; vacuum microelectronic devices; Anodes; Computational modeling; Computer simulation; Diodes; Electron emission; Electron tubes; Electrostatic analysis; Finite element methods; Laplace equations; Microelectronics;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487037
