DocumentCode
3252101
Title
Novel ITO alloy for microwave and optical applications
Author
Bourry, Mathieu ; Sarret, Michel ; Drissi, Mhamed
Author_Institution
Departement Informatique, UQAM, Montreal, Que.
fYear
2005
fDate
7-10 Aug. 2005
Firstpage
615
Abstract
This study presents the analysis of an innovative alloy made of indium tin oxide sputtered in a reducing atmosphere of argon-nitrogen gas. The physical properties are first studied with the crystallographic analysis and with the optical transmission of the layer. Then the electrical properties of the new ITO in DC analysis are compared to the classical ITO alloy. Finally an antenna is manufactured to estimate the radiofrequency performances by the measurement of the absolute gain of a patch antenna in which a thick layer is tested thanks to the new alloy properties
Keywords
crystallography; indium compounds; sputter deposition; thin films; tin compounds; DC analysis; ITO alloy; argon-nitrogen gas; crystallographic analysis; electrical properties; indium tin oxide; layer optical transmission; sputtering; Antenna measurements; Atmosphere; Crystallography; Gain measurement; Indium tin oxide; Manufacturing; Performance evaluation; Radio frequency; Thickness measurement; Tin alloys;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2005. 48th Midwest Symposium on
Conference_Location
Covington, KY
Print_ISBN
0-7803-9197-7
Type
conf
DOI
10.1109/MWSCAS.2005.1594176
Filename
1594176
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