Title :
Novel ITO alloy for microwave and optical applications
Author :
Bourry, Mathieu ; Sarret, Michel ; Drissi, Mhamed
Author_Institution :
Departement Informatique, UQAM, Montreal, Que.
Abstract :
This study presents the analysis of an innovative alloy made of indium tin oxide sputtered in a reducing atmosphere of argon-nitrogen gas. The physical properties are first studied with the crystallographic analysis and with the optical transmission of the layer. Then the electrical properties of the new ITO in DC analysis are compared to the classical ITO alloy. Finally an antenna is manufactured to estimate the radiofrequency performances by the measurement of the absolute gain of a patch antenna in which a thick layer is tested thanks to the new alloy properties
Keywords :
crystallography; indium compounds; sputter deposition; thin films; tin compounds; DC analysis; ITO alloy; argon-nitrogen gas; crystallographic analysis; electrical properties; indium tin oxide; layer optical transmission; sputtering; Antenna measurements; Atmosphere; Crystallography; Gain measurement; Indium tin oxide; Manufacturing; Performance evaluation; Radio frequency; Thickness measurement; Tin alloys;
Conference_Titel :
Circuits and Systems, 2005. 48th Midwest Symposium on
Conference_Location :
Covington, KY
Print_ISBN :
0-7803-9197-7
DOI :
10.1109/MWSCAS.2005.1594176
