Micro-patterned polycrystalline diamond field emitter diode arrays

Electron field emission from an array of patterned pyramids of polycrystalline diamond for vacuum diode applications has been investigated. High current emission from the patterned diamond microtip arrays was obtained at low electric fields. An emission current from the diamond microtips of 0.1 mA was observed for a field of <10 V//spl mu/m. Field emission for these diamond microtips exhibits significant enhancement both in total emission current and stability compared to pure silicon emitters. Moreover, field emission from patterned polycrystalline diamond pyramidal tip arrays is unique in that the applied field is found to be lower compared to that required for emission from Si, Ge, GaAs, and metal surfaces. The fabrication process utilizing silicon shaping and micromachining techniques for the fabrication of diamond diaphragms with diamond microtip arrays for vacuum microelectronic applications has been developed. The processing techniques are compatible with IC fabrication technology. The effect of temperature annealing on the current emission characteristics was also investigated.